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- Silicon Ingot
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Product serial number
Quantity
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Category
Larger Diameter Silicon Material
1
Product description
Parameters
Product Description
Large size and high purity single crystal products made of Czochralski Method are mainly used as very key materials for plasma etcher in IC chip manufacturing. We can provide silicon ingots with different sizes and resistivity to meet customer requirements.
Product Application
Raw material for making cathode and focus ring of plasma etcher.
Technical Parameters
| Diameter/mm | Type/Orientation | Purity |
Electrical Resistivity（Ω.cm） |
Length |
|
φ200-φ580 |
P/<100>/<111> |
10～11N |
≤0.02 |
Customer Spec |
|
1-4 |
||||
|
60-90 etc. |
||||
| Customer Spec |
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