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- Silicon Cylinder
Retail price
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元
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元
Number of views:
1000
Product serial number
Quantity
-
+
Stock:
Category
Larger Diameter Silicon Material
1
Product description
Parameters
Product Description
This product is made from silicon ingot with coring process and outside grinding technology. We can provide cylinders with different sizes and resistivity to meet customer requirements.
Product Applicaion
A raw material used for making focus ring of plasma etcher.
Technical Parameters
| Outer Diameter/mm | Inner Diameter/mm | Type/Orientation | Purity |
Electrical Rresistivity/Ω.cm |
Length/mm |
|
φ200-φ580 |
Customer Spec |
P/<100>/<111> |
10～11N |
≤0.02 |
Customer Spec |
|
1-4 |
|||||
|
60-90 etc. |
|||||
| Customer Spec |
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