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- Silicon Ring

This product is cut from silicon cylinder with multi wire saw. It can be made for focus ring of plasma etcher with further process in customer side.
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Number of views:
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Product description
Parameters

Product Description
This product is cut from silicon cylinder with multi wire saw. 


Product Application
It can be made for focus ring of plasma etcher with further process in customer side.


Technical Parameters

Technical Parameters

Outer Diameter/mm Inner Diameter/mm Type/Orientation Purity

Electrical Rresistivity/Ω.cm

Thickness/mm

φ200-φ580

Customer Spec

P/<100>/<111>

10~11N

≤0.02

Customer Spec

1-4

60-90 etc.

Customer Spec
       
         
 
 
 
We could not find any corresponding parameters, please add them to the properties table
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